4” Wafer / Mask Cleaning Kit
Cat. No.
Model
Carrier Size
Slot수
W01-140-655
L0408-PPS
w120×d55×h80mm
8
6” Wafer / Mask Cleaning Kit
Cat. No.
Model
Carrier Size
Slot수
W01-140-659
L0608-PPS
w180×d55×h95mm
8